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[IEEE 2006 IEEE International Frequency Control Symposium and Exposition - Miami, FL, USA (2006.06.4-2006.06.7)] 2006 IEEE International Frequency Control Symposium and Exposition - A 10MHz piezoresistive MEMS resonator with high Q

✍ Scribed by Beek, J.t.m.; Steeneken, P.G.; Giesbers, B.

Book ID: 118232675
Publisher: IEEE
Year: 2006
Weight: 741 KB
Volume: 0
Category: Article
ISBN-13: 9781424400744
DOI: 10.1109/freq.2006.275432

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