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[IEEE 2003 IEEE International Conference on Robotics and Automation (Cat No 03CH37422) SOI-03) - Newport Beach, CA, USA (2003.10.2-2003.10.2)] 2003 IEEE International Conference on Robotics and Automation (Cat No 03CH37422) SOI-03) - Strain evaluation for thin strained-Si on SGOI and strained-Si on nothing (SSON) structures using nano-beam electron diffraction (NBD)

✍ Scribed by Usuda, ; Numata, ; Tezuka, ; Sugiyama, ; Moriyama, ; Nakaharai, ; Takagi,

Book ID: 118185079
Publisher: IEEE
Year: 2003
Weight: 197 KB
Volume: 0
Category: Article
ISBN-13: 9780780378155
DOI: 10.1109/soi.2003.1242928

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