𝔖 Bobbio Scriptorium

✦ LIBER ✦

[IEEE 2002 Conference on Optoelectronic and Microelectron Materials and Devices - Sydney, NSW, Australia (11-13 Dec. 2002)] 2002 Conference on Optoelectronic and Microelectronic Materials and Devices. COMMAD 2002. Proceedings (Cat. No.02EX601) - Variable MEMS-based inductors fabricated from PECVD silicon nitride

✍ Scribed by Dell, J.M.; Winchester, K.; Musca, C.A.; Antoszewski, J.; Faraone, L.

Book ID: 120214024
Publisher: IEEE
Year: 2002
Weight: 274 KB
Category: Article
ISBN-13: 9780780375710
DOI: 10.1109/COMMAD.2002.1237315

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