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[IEEE 2001 Microelectromechanical Systems Conference - Berkeley, CA, USA (24-26 Aug. 2001)] 2001 Microelectromechanical Systems Conference (Cat. No. 01EX521) - Motorola MEMS switch technology for high frequency applications

✍ Scribed by De Silva, A.P.; Vaughan, C.; Frear, D.; Liu, L.; Kuo, S.M.; Foerstner, J.; Drye, J.; Abrokwah, J.; Hughes, H.; Amrine, C.; Butler, C.; Markgraf, S.; Denton, H.; Springer, S.

Book ID: 121842303
Publisher: IEEE
Year: 2002
Weight: 323 KB
Category: Article
ISBN-13: 9780780372245
DOI: 10.1109/MEMSC.2001.992733

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