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[IEEE 2001 Microelectromechanical Systems Conference - Berkeley, CA, USA (24-26 Aug. 2001)] 2001 Microelectromechanical Systems Conference (Cat. No. 01EX521) - BioMEMS and microfluidics applications of surface micromachining technology

✍ Scribed by Okandan, M.; Galambos, P.; Mani, S.; Jakubczak, J.

Book ID: 120582489
Publisher: IEEE
Year: 2002
Weight: 608 KB
Category: Article
ISBN-13: 9780780372245
DOI: 10.1109/MEMSC.2001.992727

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