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[IEEE 2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. - San Jose, CA, USA (8-10 Oct. 2001)] 2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203) - Comparative analysis of 300 mm FAB architectures impact of equipment sets on wafer cost and dynamic performance

✍ Scribed by Bachrach, R.; Pool, M.; Genovese, K.; Moran, J.C.; O'Halloran, M.D.; Connolly, T.J.

Book ID: 126718617
Publisher: IEEE
Year: 2001
Weight: 753 KB
Category: Article
ISBN-13: 9780780367319
DOI: 10.1109/ISSM.2001.962992

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