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[IEEE 2001 BIPOLAR/BiCMOS Circuits and Technology Meeting - Minneapolis, MN, USA (30 Sept.-2 Oct. 2001)] Proceedings of the 2001 BIPOLAR/BiCMOS Circuits and Technology Meeting (Cat. No.01CH37212) - Ultra shallow boron base profile with carbon implantation

✍ Scribed by Magnee, P.H.C.; Kemmeren, A.L.A.M.; Cowern, N.E.B.; Slotboom, J.W.; Havens, R.J.; Huizing, H.G.A.

Book ID: 118063340
Publisher: IEEE
Year: 2001
Weight: 347 KB
Volume: 0
Category: Article
ISBN-13: 9780780370197
DOI: 10.1109/bipol.2001.957858

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