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[IEEE 1999 IEEE Hong Kong Electron Devices Meeting - Shatin, Hong Kong (26 June 1999)] Proceedings 1999 IEEE Hong Kong Electron Devices Meeting (Cat. No.99TH8458) - Electrical modeling of MEMS sensor for integrated accelerometer applications

✍ Scribed by Lee, W.F.; Chan, P.K.; Siek, L.

Book ID: 125330870
Publisher: IEEE
Year: 1999
Weight: 345 KB
Edition: 1999
Category: Article
ISBN-13: 9780780356481
DOI: 10.1109/HKEDM.1999.836415

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