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[IEEE 1998 International Conference on Ion Implantation Technology. Proceedings. Ion Implantation Technology - 98 - Kyoto, Japan (22-26 June 1998)] 1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144) - Surface swelling of MeV Si ion implanted silicon

✍ Scribed by Ikeyama, M.; Saitoh, K.; Nakao, S.; Niwa, H.; Tanemura, S.; Miyagawa, Y.; Miyagawa, S.

Book ID: 115497928
Publisher: IEEE
Year: 1998
Weight: 333 KB
Volume: 2
Category: Article
ISBN-13: 9780780345386
DOI: 10.1109/iit.1998.813772

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