✦ LIBER ✦

[IEEE 1998 IEEE International SOI Conference Proceedings - Stuart, FL, USA (5-8 Oct. 1998)] 1998 IEEE International SOI Conference Proceedings (Cat No.98CH36199) - Noncontact acoustic wave metrology of SOI substrates

✍ Scribed by Banet, M.; Allen, L.P.; Nelson, K.A.; Fuchs, M.; Rogers, J.A.; Akthukal, A.; Maznev, A.

No coin nor oath required. For personal study only.

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