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[IEEE 1998 IEEE International SOI Conference Proceedings - Stuart, FL, USA (5-8 Oct. 1998)] 1998 IEEE International SOI Conference Proceedings (Cat No.98CH36199) - Defect free deep trench isolation for high voltage bipolar application on SOI wafer

โœ Scribed by Yindepol, W.; Bashir, R.; McGregor, J.M.; Brown, K.C.; De Wolf, I.; De Santis, J.; Ahmed, A.


Book ID
120038910
Publisher
IEEE
Year
1998
Weight
281 KB
Edition
1
Category
Article
ISBN-13
9780780345003

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