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[IEEE 1998 Fourth International High Temperature Electronics Conference. HITEC - Albuquerque, NM, USA (14-18 June 1998)] 1998 Fourth International High Temperature Electronics Conference. HITEC (Cat. No.98EX145) - SiC-AlN structure based MEMS

✍ Scribed by Korlyakov, A.V.; Luchinin, V.V.

Book ID: 126780821
Publisher: IEEE
Year: 1998
Tongue: English
Weight: 285 KB
Category: Article
ISBN-13: 9780780345409
DOI: 10.1109/hitec.1998.676797

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