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[IEEE 1996 IEEE International SOI Conference Proceedings - Sanibel Island, FL, USA (30 Sept.-3 Oct. 1996)] 1996 IEEE International SOI Conference Proceedings - Effect of annealing sequences on the structure of buried oxide layer in low-dose SIMOX

โœ Scribed by Sudou, M.; Kainuma, M.; Arai, K.; Takamatsu, M.; Nakai, T.; Shingyouji, T.; Cordts, B.


Book ID
118058332
Publisher
IEEE
Year
1996
Weight
671 KB
Volume
0
Category
Article
ISBN-13
9780780333154

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