[IEEE 1994 IEEE International SOI Conference - Nantucket, MA, USA (3-6 Oct. 1994)] Proceedings. IEEE International SOI Conference - Evaluation of fixed oxide charge and oxide-silicon interface trap densities in low-dose and high-dose SIMOX wafers

✍ Scribed by Masui, S.; Nakajima, T.; Kawamura, K.; Yano, T.; Hamaguchi, I.; Kajiyama, K.; Tachimori, M.

• Book ID: 111916950
• Publisher: IEEE
• Year: 1994
• Tongue: English
• Weight: 207 KB
• Volume: 0
• Category: Article
• ISBN-13: 9780780324077
• DOI: 10.1109/soi.1994.514257