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[IEEE 1994 IEEE International Electron Devices Meeting - San Francisco, CA, USA (11-14 Dec. 1994)] Proceedings of 1994 IEEE International Electron Devices Meeting - A novel salicide process (SEDAM) for sub-quarter micron CMOS devices

โœ Scribed by Mogami, T.; Wakabayashi, H.; Saito, Y.; Matsuki, T.; Tatsumi, T.; Kunio, T.


Book ID
126657634
Publisher
IEEE
Year
1994
Weight
310 KB
Category
Article
ISBN-13
9780780321113

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