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[IEEE 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest - Maastricht, Netherlands (25-29 Jan. 2004)] 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest - Nanometer-thin titania films with SAM-level stiction and superior wear resistance for reliable MEMS performance

✍ Scribed by Ashurst, W.R.; Jang, Y.J.; Magagnin, L.; Carraro, C.; Sung, M.M.; Maboudian, R.

Book ID: 121527886
Publisher: IEEE
Year: 2004
Tongue: English
Weight: 311 KB
Category: Article
ISBN-13: 9780780382657
DOI: 10.1109/MEMS.2004.1290545

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