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[IEEE 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest - Maastricht, Netherlands (25-29 Jan. 2004)] 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest - Micromechanical "hollow-disk" ring resonators

✍ Scribed by Sheng-Shian Li, ; Yu-Wei Lin, ; Yuan Xie, ; Zeying Ren, ; Nguyen, C.T.-C.

Book ID: 120595524
Publisher: IEEE
Year: 2004
Tongue: English
Weight: 389 KB
Category: Article
ISBN-13: 9780780382657
DOI: 10.1109/MEMS.2004.1290711

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