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Identification of the first nucleated phase in the interfacial reactions of ultrahigh vacuum deposited titanium thin films on silicon

✍ Scribed by Wang, M. H.; Chen, L. J.

Book ID: 120710727
Publisher: American Institute of Physics
Year: 1991
Tongue: English
Weight: 701 KB
Volume: 58
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.104608

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