✦ LIBER ✦
Effective phase control of silicon films during high-rate deposition in atmospheric-pressure very high-frequency plasma: Impacts of gas residence time on the performance of bottom-gate thin film transistors
✍ Scribed by Kakiuchi, H.; Ohmi, H.; Yamada, T.; Hirano, A.; Tsushima, T.; Lin, W.; Yasutake, K.
- Book ID
- 121365096
- Publisher
- Elsevier Science
- Year
- 2013
- Tongue
- English
- Weight
- 745 KB
- Volume
- 234
- Category
- Article
- ISSN
- 0257-8972
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