IC-compatible fabrication of linear variable optical filters for microspectrometer

Fabrication and characterization of IC-C

Fabrication and characterization of IC-Compatible Linear Variable Optical Filters with application in a micro-spectrometer

✍ A. Emadi; H. Wu; S. Grabarnik; G. De Graaf; K. Hedsten; P. Enoksson; J.H. Correi 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 748 KB

This paper reports on an IC-Compatible process for the fabrication of Linear Variable Optical Filter (LVOF). The LVOF is integrated with a detector array to result in a micro-spectrometer. The technological challenge in fabrication of an LVOF is fabrication of a well-controlled tapered cavity layer.