Fabrication and characterization of IC-Compatible Linear Variable Optical Filters with application in a micro-spectrometer
✍ Scribed by A. Emadi; H. Wu; S. Grabarnik; G. De Graaf; K. Hedsten; P. Enoksson; J.H. Correia; R.F. Wolffenbuttel
- Publisher
- Elsevier Science
- Year
- 2010
- Tongue
- English
- Weight
- 748 KB
- Volume
- 162
- Category
- Article
- ISSN
- 0924-4247
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✦ Synopsis
This paper reports on an IC-Compatible process for the fabrication of Linear Variable Optical Filter (LVOF). The LVOF is integrated with a detector array to result in a micro-spectrometer. The technological challenge in fabrication of an LVOF is fabrication of a well-controlled tapered cavity layer. Very small taper angles, ranging from 0.001 • to 0.1 • , are fabricated in a resist layer by just one lithography step and a subsequent reflow process. The 3D pattern of resist structures is subsequently transferred into SiO 2 by an appropriate etching. Complete LVOF fabrication involves CMOS-compatible deposition of a lower dielectric mirror using a stack of dielectrics on the wafer, tapered layer formation and the deposition of the top dielectric mirror. The design principle, IC-Compatible processing and the characterization results on fabricated LVOFs are presented.