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Hydrophobic direct bonding of silicon reconstructed surfaces

✍ Scribed by C. Rauer, F. Rieutord, J. M. Hartmann, A.-M. Charvet…

Book ID
120914891
Publisher
Springer-Verlag
Year
2013
Tongue
English
Weight
395 KB
Volume
19
Category
Article
ISSN
0946-7076

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