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Hydrogenated amorphous and polycrystalline silicon TFTs by hot-wire CVD

✍ Scribed by H Meiling; A.M Brockhoff; J.K Rath; R.E.I Schropp

Book ID: 117149006
Publisher: Elsevier Science
Year: 1998
Tongue: English
Weight: 112 KB
Volume: 227-230
Category: Article
ISSN: 0022-3093
DOI: 10.1016/s0022-3093(98)00298-1

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