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Hydrogen post-etching effect on CVD diamond film

✍ Scribed by Nozomu Uchida; Tsutomu Kurita; Keizo Uematsu; Katsuichi Saito

Book ID
104910752
Publisher
Springer
Year
1990
Tongue
English
Weight
198 KB
Volume
9
Category
Article
ISSN
0261-8028

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Hydrogen in Cvd Diamond Films
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Understanding of the incorporation of hydrogen and its role in determining the properties of CVD diamond is critical to the successful commercial production of these films. Hydrogen is usually the most abundant impurity in solid-state CVD diamond and has been studied extensively by a variety of tech

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## Abstract Photo‐thermal ionization spectroscopy has been applied for investigation of hydrogenated diamond. All investigated films have shown presence of B after hydrogenation though no PTIS could be measured when they were oxidized. The presence of shallow levels with energy around 100 meV has b