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Hydrogen plasma induced defects in silicon

✍ Scribed by Jeng, S. J.; Oehrlein, G. S.; Scilla, G. J.

Book ID: 120087417
Publisher: American Institute of Physics
Year: 1988
Tongue: English
Weight: 797 KB
Volume: 53
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.99810

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