Hydrogen plasma etching of pyromeric car
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S. Park; R.M. Walser
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Article
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1985
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Elsevier Science
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English
β 595 KB
We report on a study of the etching behavior of amorphous carbon films prepared by the thermal conversion of polyfurfuryl alcohol in a hydrogen plasma. It was demonstrated that the etch rates were sensitive to the heat treatment temperature of the pyrolysis process. Etch rates increased with the gas