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Hydrogen plasma etching of CdTe

✍ Scribed by L. Svob; J. Chevallier; P. Ossart; A. Mircea


Book ID
105291310
Publisher
Springer
Year
1986
Tongue
English
Weight
164 KB
Volume
5
Category
Article
ISSN
0261-8028

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Hydrogen plasma etching of pyromeric car
✍ S. Park; R.M. Walser πŸ“‚ Article πŸ“… 1985 πŸ› Elsevier Science 🌐 English βš– 595 KB

We report on a study of the etching behavior of amorphous carbon films prepared by the thermal conversion of polyfurfuryl alcohol in a hydrogen plasma. It was demonstrated that the etch rates were sensitive to the heat treatment temperature of the pyrolysis process. Etch rates increased with the gas