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Hydrogen-plasma-assisted hybrid atomic layer deposition of Ir thin film as novel Cu diffusion barrier

✍ Scribed by Sang In Song; Jong Ho Lee; Bum Ho Choi; Hong Kee Lee; Dong Chan Shin; Jin Wook Lee

Book ID
119374144
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
799 KB
Volume
211
Category
Article
ISSN
0257-8972

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