Preparation of zinc oxide/metal oxide mu
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N Horio; M Hiramatsu; M Nawata; K Imaeda; T Torii
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Article
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1998
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Elsevier Science
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English
β 288 KB
Zinc oxide/metal oxide multilayered composite thin film varistors have been fabricated by the radio-frequency (RF, 13.56 MHz) sputtering method and the electrical properties of the films were investigated. After the Au electrode was formed on a quartz substrate by vacuum evaporation, zinc oxide (ZnO