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Hydrogen ion-driven permeation in carbonaceous films

โœ Scribed by R.A. Anderl; D.F. Holland; G.R. Longhurst


Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
774 KB
Volume
162-164
Category
Article
ISSN
0022-3115

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Hydrogen retention induced by ion implan
โœ Aichi Inouye; Shunya Yamamoto; Shinji Nagata; Masahito Yoshikawa; Tatsuo Shikama ๐Ÿ“‚ Article ๐Ÿ“… 2009 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 502 KB

The relation between hydrogen retention and optical properties of an amorphous tungsten trioxide (WO 3 ) film was investigated using 10 keV H รพ 2 ion implantation. WO 3 films (350 nm) covered by W layers (200 nm) were deposited on SiO 2 glass substrates by sputtering in a mixture of Ar and O 2 gases