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Hydrogen Incorporation in Sputter-Deposited, In-Chamber Annealed Amorphous Silicon Thin Films. An Infrared and Elastic Recoil Analysis

✍ Scribed by Rüther, R. ;Livingstone, J. ;Dytlewski, N. ;Cohen, D.


Book ID
105384376
Publisher
John Wiley and Sons
Year
1994
Tongue
English
Weight
314 KB
Volume
145
Category
Article
ISSN
0031-8965

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