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Hydrogen effect on refining of Mo metal by Ar–H2 plasma arc melting

✍ Scribed by Jae-Won Lim; Kouji Mimura; Dai Miyawaki; Jung-Min Oh; Good-Sun Choi; Sang-Bae Kim; Masahito Uchikoshi; Minoru Isshiki


Book ID
113793829
Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
298 KB
Volume
64
Category
Article
ISSN
0167-577X

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The effects of hydrogen on GaN growth by remote plasma-enhanced metal-organic chemical vapor deposition (RPE-MOCVD) were investigated. Hydrogen addition changed the gas-phase reaction in the plasma and resulted in a Ga excess growth condition by scavenging activated nitrogen species, resulting in de