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Hydrogen determination in silicon nitride films by the nuclear recoil method

โœ Scribed by I.P. Chernov; V.N. Shadrin; Ju.P. Cherdantsev; V.N. Sulema; L.V. Chramova; T.P. Smirnova; V.I. Belyi


Publisher
Elsevier Science
Year
1982
Tongue
English
Weight
245 KB
Volume
88
Category
Article
ISSN
0040-6090

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