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Hydrogen depth profiling of SiNx films by the detection of recoiled protons

โœ Scribed by Niu Huan; Wu Shiu-Chin; Huang Sheng-Liang; Lin Jandel; Deng Ray-Chern


Book ID
113284037
Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
235 KB
Volume
79
Category
Article
ISSN
0168-583X

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