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Hydrogen concentrations and mass density obtained by X-ray and neutron reflectivity on hydrogenated amorphous carbon nitride thin films

โœ Scribed by Santucci, S.; Lozzi, L.; Valentini, L.; Kenny, J.M.; Menelle, A.

Book ID
122100351
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
104 KB
Volume
11
Category
Article
ISSN
0925-9635

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Experimental techniques used to measure structural parameters of thin films such as thickness, density, and coverage provide important insights into the physical properties of these films. Structural parameters are also often used to predict the eventual performance of thin films. In this study, we