Ar dilution effects on hydrogen concentration and mass density obtained by X-ray and neutron reflectivity on hydrogenated amorphous nitride thin films

✍ Scribed by S. Santucci; L. Valentini; A. Menelle; L. Lozzi; R. Coppola; J.M. Kenny

• Book ID: 106024368
• Publisher: Springer
• Year: 2002
• Tongue: English
• Weight: 86 KB
• Volume: 74
• Category: Article
• ISSN: 1432-0630
• DOI: 10.1007/s003390101199