Humidity sensitivity of sputtered TiO2 thin films
β Scribed by Andrea Bearzotti; Alessandra Bianco; Giampiero Montesperelli; Enrico Traversa
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 405 KB
- Volume
- 19
- Category
- Article
- ISSN
- 0925-4005
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## Photo-induced hydrophilic Oxygen flow ratio Self cleaning TiO 2 thin films were deposited by reactive radio frequency magnetron sputtering of Ti target at low working pressure (1 mTorr) and various O 2 and Ar flow ratios (R O2 = O 2 /(O 2 + Ar)). Properties of TiO 2 films were measured by field