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How surface roughness affects the angular dependence of the sputtering yield

✍ Scribed by A. Hu; A. Hassanein

Book ID: 113823885
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 953 KB
Volume: 281
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2012.03.026

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