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Angular dependence of the self-ion-sputtering yield of silicon at 30 keV

✍ Scribed by O. Fröhlich; H. Baumann; K. Bethge


Book ID
113280829
Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
304 KB
Volume
50
Category
Article
ISSN
0168-583X

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