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Hot plasma box glow discharge deposition of a-Si1−x:Cx:H alloys

✍ Scribed by D.M. Bhusari; S.T. Kshirsagar


Book ID
119124606
Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
340 KB
Volume
11
Category
Article
ISSN
0167-577X

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