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Hot embossing of polymer nanochannels using PMMA moulds

✍ Scribed by Junshan Liu, Xingxing Jin, Tuo Sun, Zheng Xu, Chong Liu…

Book ID
120914851
Publisher
Springer-Verlag
Year
2012
Tongue
English
Weight
524 KB
Volume
19
Category
Article
ISSN
0946-7076

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l[Tth polymer molding techniques, it is possible to fabricate nanostructures with a replication fideli~' o~ 25 nanometers. Both hot embossing and injection molding can be used, and cycle times of down to 4 sec can be achieved m a CD injection molding process. The resolution is far below the structur