Holistic calibration of three-dimensional micro-topography systems

✍ Scribed by Evaristus Mainsah; Weiping Dong; Kenneth J. Stout

• Book ID: 103924548
• Publisher: Elsevier Science
• Year: 1995
• Tongue: English
• Weight: 631 KB
• Volume: 35
• Category: Article
• ISSN: 0890-6955
• DOI: 10.1016/0890-6955(94)p2384-r

✦ Synopsis

Surface topography measuring instruments are usually calibrated by tracing profiles of a reference specimen. Measurements on these specimens, however, often show variation due, for example to local variations in the surface finish of the reference specimen or random starting positions of the profile traced. Due to increased digitisation and the increasing use of threedimensional (3-D) analysis, the calibration routine is no longer adequate in its present form. This Paper proposes to investigate alternative 3-D topography instrument calibration procedures and calibration specimens which could be used to check a wide range of 3-D instruments, with the intention of enabling simultaneous verification of the instruments' basic magnification, the probe condition, the positional accuracy of the orthogonal axes, the frequency response of the system and the validity of the surface parameters derived from the measurement.