HiPIMS deposition of TiOx in an industrial-scale apparatus: Effects of target size and deposition geometry on hysteresis

✍ Scribed by Surpi, Alessandro; Kubart, Tomas; Giordani, Diego; Tosello, Martino; Mattei, Giovanni; Colasuonno, Marino; Patelli, Alessandro

• Book ID: 121702671
• Publisher: Elsevier Science
• Year: 2013
• Tongue: English
• Weight: 837 KB
• Volume: 235
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/j.surfcoat.2013.08.053