Highly reliable trench capacitor with SiO2/Si3N4/SiO2 stacked film : T. Watanabe, N. Goto, N. Yasuhisa, T. Yanase, T. Tanaka and S. Shinozaki. Annual Proceedings of the Reliability Physics Symposium, San Diego, U.S.A., p. 50 (1987)

• Publisher: Elsevier Science
• Year: 1988
• Tongue: English
• Weight: 130 KB
• Volume: 28
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(88)90035-2