Highly reliable trench capacitor with Si
✦ LIBER ✦
A new failure mode of very thin (< 50 Å) thermal SiO2 films : Thao N. Nguyen, P. Olivo and B. Ricco. Annual Proceedings of the Reliability Physics Symposium, San Diego, U.S.A., p. 66 (1987)
- Publisher
- Elsevier Science
- Year
- 1988
- Tongue
- English
- Weight
- 126 KB
- Volume
- 28
- Category
- Article
- ISSN
- 0026-2714
No coin nor oath required. For personal study only.
📜 SIMILAR VOLUMES