Highly photo-conductive amorphous silicon produced by thermal CVD method using intermediate species SiF2

✍ Scribed by Hideki Matsumura; Hisanori Ihara; Hiroyuki Tachibana; Hirofumi Tanaka

• Book ID: 118333499
• Publisher: Elsevier Science
• Year: 1985
• Tongue: English
• Weight: 162 KB
• Volume: 77-78
• Category: Article
• ISSN: 0022-3093
• DOI: 10.1016/0022-3093(85)90779-3