✦ LIBER ✦
Highly conductive boron-doped nanocrystalline silicon-carbide film prepared by low-hydrogen-dilution photo-CVD method using ethylene as a carbon source
✍ Scribed by Seung Yeop Myong; Hyung Kew Lee; Euisik Yoon; Koeng Su Lim
- Book ID
- 117145680
- Publisher
- Elsevier Science
- Year
- 2002
- Tongue
- English
- Weight
- 245 KB
- Volume
- 298
- Category
- Article
- ISSN
- 0022-3093
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