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Highly conductive TiO2 thin films prepared by EB-modification

โœ Scribed by E. Gofuku; Y. Toyoda; Y. Uehara; M. Kohara; M. Nunoshita

Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
684 KB
Volume
48-49
Category
Article
ISSN
0169-4332

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The structural and electrical properties
The structural and electrical properties of TiO2 thin films prepared by thermal oxidation
โœ P. Chowdhury; Harish C. Barshilia; N. Selvakumar; B. Deepthi; K.S. Rajam; Ayan R ๐Ÿ“‚ Article ๐Ÿ“… 2008 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 515 KB

Thin films of TiO 2 were grown on n-type Si substrate by thermal oxidation of Ti films deposited by dc sputtering. The phase purity of TiO 2 was confirmed by Raman spectroscopy, and secondary ion mass spectroscopy was used to analyze the interfacial and chemical composition of the TiO 2 thin films.