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High vacuum production in the microelectronics industry: Author: Pierre Duval Publishers: Elsevier Science Publishers, Sara Burgerhartstraat 25, P.O. Box 211, 1000 AE Amsterdam, The Netherlands. Elsevier Science Publishing Co., Inc., P.O. Box 1663, Grand Central Station, New York, NY 10163, United States of America. Price: US$ 86.75. Dfl. 165.00. (ISBN 0-444-42878-X). Published 1988

✍ Scribed by G.W.A.D.

Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 30 KB
Volume: 29
Category: Article
ISSN: 0026-2714
DOI: 10.1016/0026-2714(89)90355-7

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