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High temperature stability of CrSi(W)N films

✍ Scribed by W. Brückner; H. Grieβmann; J.-I. Mönch; G. Schubert; A. Heinrich


Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
475 KB
Volume
221
Category
Article
ISSN
0040-6090

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## Abstract Zinc‐nitrogen (Zn:N) compound thin film was prepared from a pure metallic Zn target by rf magnetron sputtering at ambient temperature under the mixture of nitrogen and argon gases with the ratio of 1:1. High temperature x‐ray diffraction (HTXRD) measurement under vacuum was used to exam