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High temperature silicon Hall sensor

✍ Scribed by S.R. in 't Hout; S. Middelhoek


Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
664 KB
Volume
37-38
Category
Article
ISSN
0924-4247

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Ultra-stable, high-temperature pressure
✍ Kurt Petersen; Joe Brown; Ted Vermeulen; Phillip Barth; Joseph Mallon Jr.; Janus πŸ“‚ Article πŸ“… 1990 πŸ› Elsevier Science 🌐 English βš– 627 KB

Rezorewstlve sdlcon-based pressure sensors have been fabncated which are capable of hlghpreclslon operation at temperatures as high as 250 "C These devices are fabncated by a umque &con fusion bonding process m which resistors from one wafer are bonded to the oxldlzed surface of a second wafer The m